Comparison ledger
SCREEN FS 820 L Wafer, Semitool 003163-000 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | FS 820 L WaferSCREEN | 003163-000 SRDSemitool |
|---|---|---|
| OEM | SCREEN | Semitool |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SCREEN FS 820 L Wafer | Semitool 003163-000 SRD |
| Specifications | ||
| Configuration | Baths (3)[1] | — |
| OEM | SCREEN / DNS[1] | — |
| Model | FS 820 L Wafer[2] | 003163-000[3] |
| Equipment type | Wafer Cleaner[2] | Spin Rinse Dryer (SRD)[3] |
| Wafer size | 6 inch[1] | — |
| Baths | 3[1] | — |
| Make | — | Semitool[3] |
| Asset # | — | 139375[3] |
| Last Confirm Date | — | September 03, 2025[3] |
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