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Comparison ledger

11600 SRDversusNS 300

Semitool 11600 SRD, Tokyo Electron NS 300, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
11600 SRDSemitool
NS 300Tokyo Electron
OEMSemitoolTokyo Electron
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySemitool 11600 SRDTokyo Electron NS 300
Specifications
ConfigurationCeramic[1]—
ManufacturerSemitool[1]—
Model11600 SRD[1]NS 300[6]
Equipment typeSpin Rinse Dryer[1]—
Vintage (example unit)—2006[2]
Make—Tel (Tokyo Electron)[6]
Equipment Type—Scrubber[6]
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Sources (6)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing
  5. [5]Equipment inventory listing
  6. [6]Equipment inventory listing