Comparison ledger
SUSS MicroTec HP8 / CP8 / VP8, SUSS MicroTec LabSpin6 / 8, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | HP8 / CP8 / VP8SUSS MicroTec | LabSpin6 / 8SUSS MicroTec |
|---|---|---|
| OEM | SUSS MicroTec | SUSS MicroTec |
| Category | — | — |
| Wafer size | 200mm | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SUSS MicroTec HP8 / CP8 / VP8 | SUSS MicroTec LabSpin6 / 8 |
| Specifications | ||
| System type | Manual[1] | — |
| Wafer size | up to 200 mm[1] | — |
| Processes | Baking, Cooling, Vapor Priming[1] | — |
| Substrate Size | — | up to 200 mm[1] |
| Process Capability | — | Spin coating, Puddle developing[1] |
| Operation Type | — | Manual[1] |