Comparison ledger
Tenney , TPS JR-A-F4T Junior compact temperature test chambers, Tokyo Electron Precio XL, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Precio XLTokyo Electron | |
|---|---|---|
| OEM | Tenney | Tokyo Electron |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Tenney , TPS JR-A-F4T Junior compact temperature test chambers | Tokyo Electron Precio |
| Specifications | ||
| Chamber Size | 1.2 cubic feet[1] | — |
| Temperature Range | -68°C to +180°C[1] | — |
| Control | +/-1.0°C[1] | — |
| Manufacturer | Tenney[1] | Tokyo Electron Limited[3] |
| Model | JR-A-F4T[1] | Precio XL[3] |
| Short description | Junior compact temperature test chambers[1] | — |
| Control accuracy | +/-1.0°C[1] | — |
| Configuration | — | Single Open with Open Loader[2] |
| Hot Chuck Function | — | 50~150 deg[2] |
| Type | — | Automatic wafer prober[4] |
| Wafer size | — | 200 mm, 300 mm[3] |
| Accuracy | — | 1.8 µm[3] |
| Z accuracy | — | 5 µm[3] |
| Probing force | — | 200 kg, 300 kg[3] |
| Stage type | — | Linear Motor[3] |
| Functions | — | Focus OCR; hot chuck function 50~150 deg; WAPP function; 93K DD interface; flip SACC function; GPIB[2] |
| Category | — | Test & Probe[5] |
| Equipment type | — | Production Wafer Prober[5] |
| Main features | — | TELPADS-I, Auto Leveling, CoSMOz[4] |
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