Comparison ledger
Tokyo Electron Alpha 801 D Vertical, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Alpha 801 D VerticalTokyo Electron | |
|---|---|---|
| OEM | Tokyo Electron | Varian |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Tokyo Electron Alpha | Varian 0332 F 9453 302 Diffusion |
| Specifications | ||
| Configuration | ATM Oxide[1] | — |
| Power AC | 480 V[1] | — |
| Phase | 3 Phase[1] | — |
| Type | Vertical Furnace[2] | — |
| Wafer Size | 8 inch[1] | — |
| Process Type | ATM Oxide (atmospheric oxide deposition)[2] | — |
| Power | 480 V AC, 3 Phase[2] | — |
| Frequency | 50/60 Hz[1] | — |
| Manufacturer | Tokyo Electron[2] | — |
| Model | Alpha 801 D Vertical[1] | 0332 F 9453 302[3] |
| Category | Thermal / Diffusion[2] | Thermal / Diffusion[5] |
| Asset Number | — | 142841[3] |
| Last Confirm Date | — | October 14, 2025[4] |
| Make | — | Varian[3] |
| Tool type | — | diffusion pump[5] |
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