Comparison ledger
Tri -Mist 850 Electronic Air Filter, Varian VHS 4, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | VHS 4Varian | |
|---|---|---|
| OEM | Tri | Varian |
| Category | Lab & Support Equipment | Lab & Support Equipment |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Tri -Mist 850 Electronic Air Filter | Varian VHS |
| Specifications | ||
| Pumping Speed | — | 1200 l/s[1] |
| ASA Type Flange | — | 9 in. OD, 5.9 in. ID[1] |
| Voltage | — | 120V, 50/60 Hz[1] |
| Voltage/Frequency | — | 120V, 50/60 Hz[1] |
| Type | — | High speed diffusion pump[2] |
| Inlet flange | — | 9 in. OD, 5.9 in. ID[2] |
| Electrical requirements | — | 120V, 50/60 Hz[1] |
| Cooling | — | Water cooled[2] |
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