Comparison ledger
Varian 0332 F 9453 302 Diffusion, Varian HS 20 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | HS 20 DiffusionVarian | |
|---|---|---|
| OEM | Varian | Varian |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Varian 0332 F 9453 302 Diffusion | Varian HS 20 Diffusion |
| Specifications | ||
| Asset Number | 142841[1] | — |
| Last Confirm Date | October 14, 2025[2] | — |
| Make | Varian[1] | — |
| Model | 0332 F 9453 302[1] | HS 20[4] |
| Category | Thermal / Diffusion[3] | — |
| Tool type | diffusion pump[3] | — |
| Type | — | Diffusion pump[5] |
| Cooling method | — | Water-cooled[5] |
| Pumping speed, maximum, air | — | 17,500 l/s[6] |
| Pumping speed, maximum, helium | — | 22,000 l/s[6] |
| Inlet flange | — | 20" ASA[7] |
| Foreline flange | — | ISO63-K[7] |
| Power | — | 480 VAC, 3-Ø[7] |
| Oil capacity | — | 4.70 liters[7] |
| Weight | — | 264 kg[7] |
Plan your fab
Building a Thermal / Diffusion process? Get a complete equipment list.
Open the fab equipment planner →