Waferpedia

Comparison ledger

0332 F 9453 302 Diffusionversus58

Varian 0332 F 9453 302 Diffusion, YES 58, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
58YES
OEMVarianYES
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyVarian 0332 F 9453 302 DiffusionYES 58
Specifications
Asset Number142841[1]—
Last Confirm DateOctober 14, 2025[2]—
MakeVarian[1]—
Model0332 F 9453 302[1]58[4]
CategoryThermal / Diffusion[3]Thermal / Diffusion[5]
Tool typediffusion pump[3]—
Voltage—120 VAC[4]
Configuration—50/60 Hz[4]
Manufacturer—YES[5]
Power—1700 Watts[4]
Frequency—50/60 Hz[4]
Current—14.2 A[4]
Gas—NH3 (ammonia)[6]
Process—Image reversal[6]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]fab-spares.comfab-spares.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]inventory listing
  5. [5]waferpedia.comwaferpedia.com
  6. [6]cnfusers.cornell.educnfusers.cornell.edu