Comparison ledger
Varian 160 XP Ion, Varian E 1000 HP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 160 XP IonVarian | E 1000 HP IonVarian |
|---|---|---|
| OEM | Varian | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Varian 160 XP Ion | Varian E 1000 HP Ion |
| Specifications | ||
| Configuration | 150mm High Current IMP[1] | Leybold QDP-80, D8 Roughing Pumps[3] |
| OEM | Varian[2] | Varian[4] |
| Model | 160 XP Ion[2] | E 1000 HP[4] |
| Category | Ion Implantation[1] | — |
| Tool type | ion implanter[1] | — |
| Phase | — | 3 Phase[3] |
| Asset # | — | 126887[4] |
| Wafer sizes | — | 6, 8 inch[3] |
| Power | — | 3 Phase[3] |
| Roughing pumps | — | Leybold QDP-80, D8 Roughing Pumps[3] |
| Cryo compressor | — | CTI 8250 Cryo Compressor (x2)[3] |
| Manuals | — | Included[3] |
| Vintage | — | 1995[3] |
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