Comparison ledger
Varian 160 XP, Varian E 1000 HP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 160 XPVarian | E 1000 HP IonVarian |
|---|---|---|
| OEM | Varian | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Varian 160 XP | Varian E 1000 HP Ion |
| Cited variants |
| — |
| Specifications | ||
| Configuration (160 XP Ion variant) | 150mm High Current IMP[1] | — |
| Phase | — | 3 Phase[2] |
| Configuration | — | Leybold QDP-80, D8 Roughing Pumps[2] |
| OEM | — | Varian[3] |
| Model | — | E 1000 HP[3] |
| Asset # | — | 126887[3] |
| Wafer sizes | — | 6, 8 inch[2] |
| Power | — | 3 Phase[2] |
| Roughing pumps | — | Leybold QDP-80, D8 Roughing Pumps[2] |
| Cryo compressor | — | CTI 8250 Cryo Compressor (x2)[2] |
| Manuals | — | Included[2] |
| Vintage | — | 1995[2] |
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