Waferpedia

Comparison ledger

Axioplan2 versus Supra 40 VP

Zeiss Axioplan2 and Zeiss Supra 40 VP, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
OEMZeissZeiss
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyZeiss Axioplan2Zeiss Supra 40 VP
Specifications
ManufacturerZeiss[1]
ModelAxioplan2[1]
Listed asLinewidth2 Zeiss Axioplan2 Measuring System[1]
ConfigurationCoolstage (never used)[2]
Lowest Coolstage Temp-50 C Deg[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]nanolab.berkeley.edunanolab.berkeley.edu
  2. [2]inventory listing