Waferpedia

Comparison ledger

Axioscope 7 versus Sigma HDVP

Zeiss Axioscope 7 and Zeiss Sigma HDVP, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
OEMZeissZeiss
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyZeiss AxioscopeZeiss Sigma
Specifications
ConfigurationWith:[1]Electron source[2]
Acceleration voltage0.02 kV - 30 kV[2]
Magnification range10-1.000.000x[2]
Specimen chamber358 mm[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing