Waferpedia

Comparison ledger

Gemini560 versus Supra 55 VP

Zeiss Gemini560 and Zeiss Supra 55 VP, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
Gemini560Zeiss
Supra 55 VPZeiss
OEMZeissZeiss
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyZeiss Gemini560Zeiss Supra 55
Specifications
equipment typeSEM[1]—
Windows OS—W10[2]
Software—SmartSEM (v6)[2]
Source Type—TFE[2]
Configuration—Variable pressure[2]
Primary pump—turbo[2]
Gemini560 entrySupra 55 VP entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]snsf.stanford.edusnsf.stanford.edu
  2. [2]inventory listing