Comparison ledger
Zeiss Leo 1530 FE-SEM and Zeiss Supra 55 VP, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | Leo 1530 FE-SEMZeiss | Supra 55 VPZeiss |
|---|---|---|
| OEM | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Zeiss LEO | Zeiss Supra 55 |
| Specifications | ||
| Configuration | Four-Quadrant Backscattered Electron Detector (4QBSD)[1] | Variable pressure[2] |
| OXFORD 6901 EDX Detector with resolution | 133 eV at 5.9 KeV[1] | — |
| Determination area | 10 mm²[1] | — |
| Windows OS | — | W10[2] |
| Software | — | SmartSEM (v6)[2] |
| Source Type | — | TFE[2] |
| Primary pump | — | turbo[2] |
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