Waferpedia

Comparison ledger

Sigma 300 VP FE-SEM versus Supra 40 VP

Zeiss Sigma 300 VP FE-SEM and Zeiss Supra 40 VP, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
OEMZeissZeiss
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyZeiss SigmaZeiss Supra 40 VP
Specifications
Configuration50/60 Hz[1]Coolstage (never used)[2]
1/N/PE230 Vac[1]
2/PE208 Vac[1]
Lowest Coolstage Temp-50 C Deg[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing