Comparison ledger
Zeiss Sigma HDVP and Zeiss Supra 55 VP, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | Sigma HDVPZeiss | Supra 55 VPZeiss |
|---|---|---|
| OEM | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Zeiss Sigma | Zeiss Supra 55 |
| Specifications | ||
| Acceleration voltage | 0.02 kV - 30 kV[1] | — |
| Magnification range | 10-1.000.000x[1] | — |
| Configuration | Electron source[1] | Variable pressure[2] |
| Specimen chamber | 358 mm[1] | — |
| Windows OS | — | W10[2] |
| Software | — | SmartSEM (v6)[2] |
| Source Type | — | TFE[2] |
| Primary pump | — | turbo[2] |
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