Comparison ledger
ABM -407B-1-S-CES293 Robot, Heller 1400 MK5-S, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1400 MK5-SHeller | |
|---|---|---|
| OEM | ABM | Heller |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 2020– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Heller 1400 MK5-S |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[1] | 1400 MK5-S[2] |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| • Manufactured | — | February 2020[2] |
| Manufacturer | — | Heller[2] |
| Category | — | Ovens[2] |
| Condition | — | Used[2] |
| Year(s) | — | 2020[2] |
| Power | — | 208V[2] |
| Flow direction | — | Left to Right[2] |
| Process | — | Designed to cure an underfill and dam-fill / glob top epoxy process[2] |
| Zones | — | 3 heated zones and 1 cooling zone[2] |
| Blower control | — | Variable blower speed control for the 3 heated zones[2] |
| Cooling control | — | Separate control for the cooling zone[2] |
| Conveyor speed | — | 0-7.7 CM / M[2] |
| Footprint | — | Extremely small footprint[2] |
| Edge rail | — | Edge rail with oiler[2] |
| Safety | — | Added ventilation interlocks/safety mechanisms for the curing process[2] |