Comparison ledger
ABM -407B-1-S-CES293 Robot, Thermotron SE 300 2 2 Environmental, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SE 300 2 2 EnvironmentalThermotron | |
|---|---|---|
| OEM | ABM | Thermotron |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Thermotron SE 300 2 2 Environmental |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[1] | — |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Workspace dimensions | — | 24 x 26.25 x 28 in; 61 x 67 x 71 cm[2] |
| Workspace volume | — | 10.2 ft³; 289 L[2] |
| Temperature uniformity | — | ±0.5°C (±0.9°F)[2] |
| Temperature range | — | -70°C to 180°C (-94°F to 356°F)[2] |
| Temperature control tolerance | — | 0.3°C (0.5°F)[2] |
| Approx. shipping weight | — | 1,330 lbs; 603 kg[2] |
| Move-in dimensions | — | 35 x 70 x 78 in; 89 x 178 x 198 cm[2] |
| Humidity range | — | 10 to 98% RH[2] |
| Humidity control | — | +/- 2.5% RH[2] |
| Heating performance | — | 17 min (-65° to 71°C); 36 min (-65° to 180°C); 16 min (-40° to 85°C)[2] |
| Heating rate | — | 8°C/min (-65° to 71°C); 6.8°C/min (-65° to 180°C); 7.8°C/min (-40° to 85°C)[2] |
| Electrical requirements | — | 23 A at 460/3/60; 24 A at 400/3/50; 46 A at 230/3/60; 46 A at 208/3/60[2] |
| Cooling performance | — | 35 min (85° to -40°C); 48 min (71° to -65°C); 75 min (180° to -65°C)[2] |
| Cooling rate | — | 3.5°C/min (85° to -40°C); 2.8°C/min (71° to -65°C); 3.2°C/min (180° to -65°C)[2] |
| Compressor size | — | (2) 2 HP[2] |
| Airflow | — | 500 CFM[2] |