Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Pfeiffer MVP 040 2 Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MVP 040 2 VacuumPfeiffer | |
|---|---|---|
| OEM | ABM | Pfeiffer |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Pfeiffer MVP |
| Cited variants | — |
|
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[2] | MVP 040 2 / MVP 040-2[3] |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Max pumping speed | — | 2.3 / 2.5 m³/h[3] |
| Power consumption | — | 180 W[3] |
| Configuration | — | 100–115 V / 50–60 Hz[3] |
| 120 V / 60 Hz | — | 3.4 A[3] |
| 200–230 V / 50–60 Hz | — | 1.8 A[3] |
| Power | — | 180 W[4] |
| Pw | — | 180 W[5] |
| Equipment type | — | Vacuum pump[3] |
| Pump type | — | Diaphragm pump[1] |
| Pumping stages | — | 2[1] |
| Nominal pumping speed at 50 Hz | — | 2.3 m³/h[1] |
| Nominal pumping speed at 60 Hz | — | 2.5 m³/h[1] |
| Motor rating | — | 180 W[1] |
| Rated current absorption | — | 100–115 V 50/60 Hz: 3.4 A; 120 V 60 Hz: 3.4 A; 200–230 V 50/60 Hz: 1.8 A[1] |
| Voltage / frequency | — | 100–115 V / 50–60 Hz; 120 V / 60 Hz; 200–230 V / 50–60 Hz[3] |
| Vintage | — | 2011[3] |
| Weight | — | 11.4 kg[1] |
| Ambient temperature | — | 12–40 °C[1] |
| Exhaust pressure max. | — | 1100 mbar[1] |
| Leak rate | — | 1 × 10^-2 mbar l/s[1] |
| Ultimate pressure with gas ballast | — | 5 mbar[1] |
| Ultimate pressure without gas ballast | — | 4 mbar[1] |
| Rotation speed at 50 Hz | — | 1500 rpm[1] |
| Rotation speed at 60 Hz | — | 1800 rpm[1] |
| Sound pressure level | — | 51 dB(A) at 50 Hz; 53 dB(A) at 60 Hz[1] |
| Order number | — | PKT01210[1] |