Waferpedia

Comparison ledger

HFV 8000versus0010-21246 Part

Advanced Energy HFV 8000, Applied Materials 0010-21246 Part, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
HFV 8000Advanced Energy
0010-21246 PartApplied Materials
OEMAdvanced EnergyApplied Materials
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAdvanced Energy HFV 8000—
Specifications
M/N3155083-130[1]—
TypeVariable frequency RF plasma generator[3]—
Power output3 kW[4]—
Operating frequency2 MHz[4]—
Input voltage208 V input[4]—
Frequency range1.765 MHz to 2.165 MHz[3]—
Maximum output power5000 W[3]—
CoolingWater cooled[3]—
Control interface15-pin[3]—
MakeAdvanced Energy[1]—
ModelHFV 8000[1]—
Asset #71099[1]—
OEMAdvanced Energy[1]—
Equipment typeGenerator[1]—
Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]yorkscientific.comyorkscientific.com
  4. [4]manualzilla.commanualzilla.com