Comparison ledger
Advanced Energy HFV 8000, Applied Materials 0010-22161 High EFF RF Match, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | HFV 8000Advanced Energy | 0010-22161 High EFF RF MatchApplied Materials |
|---|---|---|
| OEM | Advanced Energy | Applied Materials |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Advanced Energy HFV 8000 | Applied Materials 0010-22161 High EFF RF Match |
| Specifications | ||
| M/N | 3155083-130[1] | — |
| Type | Variable frequency RF plasma generator[3] | — |
| Power output | 3 kW[4] | — |
| Operating frequency | 2 MHz[4] | — |
| Input voltage | 208 V input[4] | — |
| Frequency range | 1.765 MHz to 2.165 MHz[3] | — |
| Maximum output power | 5000 W[3] | — |
| Cooling | Water cooled[3] | — |
| Control interface | 15-pin[3] | — |
| Make | Advanced Energy[1] | Applied Materials[5] |
| Model | HFV 8000[1] | 0010-22161[5] |
| Asset # | 71099[1] | — |
| OEM | Advanced Energy[1] | — |
| Equipment type | Generator[1] | — |
| Description | — | HTESC PH 1 REV A[6] |
| Condition | — | Used[6] |
| Stock Number | — | BM6628[6] |