Comparison ledger
Advanced Energy RFG 1250 Halo, Advanced Energy RFG 5500, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | RFG 1250 HaloAdvanced Energy | RFG 5500Advanced Energy |
|---|---|---|
| OEM | Advanced Energy | Advanced Energy |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Advanced Energy RFG | Advanced Energy RFG |
| Specifications | ||
| Configuration | Refurbished[1] | 27-115617-00[6] |
| Manufacturer | Advanced Energy[2] | — |
| Model | RFG 1250 Halo[2] | RFG 5500[5] |
| Model number | 3155027-028[3] | — |
| Output power | up to 1200W / 1.2kW[3] | — |
| Frequency mode | fixed frequency or variable frequency[3] | — |
| Used on | LAM Etchers among others[4] | — |
| M/N | — | 3155051-014[5] |
| P/N | — | 27-115617-00[7] |
| Equipment type | — | RF Generator[5] |
| Make | — | Advanced Energy[5] |
| Asset # | — | 71293[5] |
| Part number | — | 3155051-014, 3155051-010, 3155051-015[5] |