Waferpedia

Comparison ledger

11980 A Fiber Opticversus3D

Agilent 11980 A Fiber Optic, Zygo 3D, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
3DZygo
OEMAgilentZygo
CategoryPrecision OpticsPrecision Optics
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAgilent 11980 A Fiber OpticZygo 3D
Cited variants—
  • Z3D-7000[1]
  • NewView 600s[1]
  • NewView 6000 Series[1]
Specifications
Configuration1250-1600nm[2]—
Wavelength Range1250-1600nm[2]—
Measurement type—Fast, noncontact, high-accuracy, 3D metrology of surface features[1]
Software—MetroPro software[1]
Applications—Characterizing and quantifying surface roughness, step heights, critical dimensions, and other topographical features[1]
metrology type—3D noncontact surface metrology[1]
accuracy—high-accuracy[1]
measurement applications—surface roughness, step heights, critical dimensions, and other topographical features[1]
variant referenced in study—Maxim 3D system[3]

Plan your fab

Building a Precision Optics process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]inventory listing
  3. [3]osti.govosti.gov