Comparison ledger
Agilent E 500 EHPI, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | E 500 EHPIAgilent | 160 XP IonVarian |
|---|---|---|
| OEM | Agilent | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Agilent E 500 | Varian 160 XP Ion |
| Specifications | ||
| Configuration | Medium Current[1] | 150mm High Current IMP[3] |
| Current Type | Medium Current[1] | — |
| Wafer Size | 8 inch[1] | — |
| Vintage Year | 2003[2] | — |
| Manufacturer | Agilent / Varian[1] | — |
| Model | E 500 EHPI[1] | 160 XP Ion[4] |
| Category | Ion Implantation[2] | Ion Implantation[3] |
| Tool type | Medium current ion implanter[2] | ion implanter[3] |
| OEM | — | Varian[4] |
Plan your fab
Building a Ion Implantation process? Get a complete equipment list.
Open the fab equipment planner →