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0010-03254 E ChuckversusIML 6 1 Ion Mill

Applied Materials 0010-03254 E Chuck, Hitachi IML 6 1 Ion Mill, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsHitachi
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
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FamilyApplied Materials 0010-03254 E ChuckHitachi IML 6 1 Ion Mill
Specifications
ManufacturerApplied Materials[1]—
Model0010-03254[1]IML 6 1[2]
Tool designationE Chuck[1]—
Configuration—With:[2]
OEM—Hitachi[2]
Equipment type—Ion mill[2]
Wafer size—6 inch[2]
Power—DC Volt Generator[3]
Vacuum & pumping—Kashyama CH 60 Dry Pump[3]
Configuration & options—CH-4014 Circulator; Spare Parts[3]
Vintage—1997[2]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com