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0010-03254 E ChuckversusRS 55 Sheet Resistance Measurement

Applied Materials 0010-03254 E Chuck, KLA RS 55 Sheet Resistance Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsKLA
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—KLA RS 55
Cited variants—
Specifications
Configuration—115 Volts[2]
OEM—KLA[3]
Model—RS 55[3]
Power—1.8 K watts[4]
Voltage—115 volts[4]
Frequency—50/60 Hz[4]
Option—Heated TC Option[4]
Condition note—Missing probe head[4]
Make—KLA[3]
Description—Sheet resistance measurement[3]
Type—Sheet resistance measurement system[4]
Measurement method—Four point probe resistivity mapping system[1]
Wafer size—Up to 8" / 200mm wafers[1]
Wafer handling—Manual wafer handling[1]
Functions—Contour maps, 3-D plots, and diameter scans[1]
Sources (4)Every fact above is drawn from these public sources
  1. [1]tech-semi.comtech-semi.com
  2. [2]inventory listing
  3. [3]Equipment inventory listing
  4. [4]waferpedia.comwaferpedia.com