Comparison ledger
Applied Materials 0010-03254 E Chuck, Leybold SP 630 Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | SP 630 VacuumLeybold |
|---|---|---|
| OEM | Applied Materials | Leybold |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Leybold SP 630 Vacuum |
| Cited variants | — |
|
| Specifications | ||
| Frequency | — | 60Hz manGB; ATEXcat3i[2] |
| Type | — | dry compressing screw vacuum pump[3] |
| Maximum pumping speed | — | 630 m3/h[3] |
| Ultimate pressure, total | — | ≤ 0.03 mbar[3] |
| Nominal power rating | — | 15 kW[3] |
| Total weight | — | approx. 530 kg[3] |
| Dimensions (L x W x H) | — | 1630 x 660 x 880 mm[3] |
| Motor speed (50 / 60 Hz) | — | 2930 / 3530 rpm[3] |
| Type of motor protection | — | IP 55[3] |
| Heat protection class | — | F[3] |
| Cooling | — | air-cooled; water cooling available for SP 630 F[1] |
| Operating agents | — | Air; Water, see Chapter 4[3] |
| Approved type of oil | — | Anderol 555[3] |
| Oil fill quantity | — | 15 l[1] |