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0010-03254 E ChuckversusTA 5000 A Temperature Forcing

Applied Materials 0010-03254 E Chuck, MPI TA 5000 A Temperature Forcing, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsMPI
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—MPI TA 5000 A Temperature Forcing
Specifications
Equipment type—Temperature forcing system[1]
Manufacturer—MPI[1]
Continuous air flow—Up to 25 SCFM[2]
Temperature range—-80°C to +225°C[2]
Temperature transition—-55°C to +125°C / +125°C to -55°C in less than 10 sec[2]
Displays—Two user touch screen displays on the head and front panel[2]
Data management—USB and SSD thermal file management and data logging[2]
Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]waferpedia.comwaferpedia.com