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0010-03254 E ChuckversusDuo 35 M Vacuum

Applied Materials 0010-03254 E Chuck, Pfeiffer Duo 35 M Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsPfeiffer
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Pfeiffer Duo
Specifications
Pumping Speed S(N2)—36.0 m3/h[1]
Max Speed (n)—1800 rpm[1]
Oil Type—Pfeiffer P3 vacuum oil[1]
Pumping speed—up to 36 m3/h[2]
Motor type—3-phase motor[2]
Motor protection—3TF[2]
Voltage, 50 Hz—230/400 V (± 5%)[2]
Voltage, 60 Hz—265/460 V (± 5%)[2]
Rotation speed, 50 Hz—1500 min-1[2]
Rotation speed, 60 Hz—1800 min-1[2]
Rated power, 50 Hz—1.1 kW[2]
Rated power, 60 Hz—1.3 kW[2]
Ultimate pressure with gas ballast—<= 3 · 10-3 hPa[2]
Ultimate pressure without gas ballast—<= 2 · 10-3 hPa[2]
Weight—70 kg[2]
Dimensions—A 704 mm; B 312 mm; C 66 mm[2]
Flange (in)—DN 40 ISO-KF[2]
Flange (out)—DN 40 ISO-KF[2]
Operating fluid—P3[2]
Operating fluid filling—3.2 l[2]
Protection category—IP 55[2]
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]avac.comavac.com