Waferpedia

Comparison ledger

0010-03254 E ChuckversusTMU 1001 P Turbo

Applied Materials 0010-03254 E Chuck, Pfeiffer TMU 1001 P Turbo, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsPfeiffer
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Pfeiffer TMU 1001 P Turbo
Specifications
Configuration—HiVac[1]
Manufacturer—Pfeiffer[1]
Model—TMU 1001 P[1]
Type—Turbo pump[2]
Designation—HiVac[2]
Flange / designation—DN 200 CF-F, 3P[2]
Condition—As-Is[1]
Vintage—2003 Vintage[1]
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com