Waferpedia

Comparison ledger

0010-13622 RF Match forversusKokusai DJ 853 V

Applied Materials 0010-13622 RF Match for, Hitachi Kokusai DJ 853 V, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
0010-13622 RF Match forApplied Materials
OEMApplied MaterialsHitachi
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13622 RF Match forHitachi Kokusai DJ 853
Specifications
ConfigurationHigh Efficiency HE RF Match-Bias[1]Low pressure[2]
Model0010-13622[1]DJ 853 V[2]
Product TypeRF Match for PVD (Physical Vapor Deposition)[1]—
FeatureHigh Efficiency HE RF Match-Bias[1]—
OEM—Hitachi Kokusai[2]
Process—CVD (Chemical Vapor Deposition)[2]
Wafer size—8 inch[2]
Operating pressure—Low pressure[2]

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing