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0010-13627 High Efficiency RF MatchversusHX 750 Chiller

Applied Materials 0010-13627 High Efficiency RF Match, Neslab HX 750 Chiller, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsNeslab
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13627 High Efficiency RF MatchNeslab HX 750
Specifications
ConfigurationHE, BIAS[1]Needs heat exchanger to operate[3]
Asset Number70430[2]—
TypeHigh Efficiency RF Match - HE, BIAS[2]—
OEMApplied Materials[2]—
Model0010-13627[2]HX 750[3]
Cooling capacity at 20°C—24,000 watts[4]
Standard temperature range—5°C to 35°C[4]
Condenser—air or water cooled[4]
Pump performance, 60 Hz, Pump 1—23 gpm at 50 psig (TU 9)[4]
Pump performance, 60 Hz, Pump 2—19 gpm at 50 psig (CP 75)[4]
Power requirements, 60 Hz—208-230V 3ø/460V 3ø[4]
Cooling capacity at 20C—24,000 Watts[5]
Available voltage—200-230V/460 3 Ph[5]
Flow rate at 20ºC / 50 PSI (TU9 Pump)—23 GPM[5]
Flow rate at 20ºC / 50 PSI (CP75 Pump)—19 GPM[5]
Temperature range—5C to 35C[5]
Ambient temperature range—13°C to 35°C[4]
Stability—±0.1°C[4]
Reservoir size—40 gallons / 151.4 liters[4]
Cooling capacity at 20°C, 60 Hz—24,000 watts[4]
Cooling capacity at 20°C, 50 Hz—19,920 watts[4]
Pump performance, 50 Hz, Pump 1—16 gpm at 50 psig (TU 9)[4]
Pump performance, 50 Hz, Pump 2—10 gpm at 40 psig (CP 75)[4]
Power requirements, 50 Hz—380-415V 3ø[4]
Plumbing connections, inlet/outlet process—1" FNPT[4]
Plumbing connections, inlet/outlet facility—1" FNPT[4]
Plumbing connection, drain—1/2" FNPT[4]
Plumbing connection, auto refill—3/8" OD SS barb[4]
Refrigerant, 60 Hz—R404A[4]
Refrigerant, 50 Hz—R404A[4]
Unit weight—971 lb / 440.4 kg[4]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]industrial-stores.comindustrial-stores.com
  5. [5]trilliumus.comtrilliumus.com