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0010-13627 High Efficiency RF MatchversusVersavac5

Applied Materials 0010-13627 High Efficiency RF Match, Temescal Versavac5, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
Versavac5Temescal
OEMApplied MaterialsTemescal
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13627 High Efficiency RF MatchTemescal Versavac5
Specifications
ConfigurationHE, BIAS[1]—
Asset Number70430[2]—
TypeHigh Efficiency RF Match - HE, BIAS[2]Vacuum gauge controller[3]
OEMApplied Materials[2]—
Model0010-13627[2]—
Referenced role—Vacuum gauge controller[3]
Source-described status—Obsolete[3]
Retrofit kit note—Complete kit for replacing obsolete Temescal Versavac5 with Granville-Phillips model 307 controller; includes model 307 controller, an ion gauge cable assembly, a TC gauge cable assembly, and complete I/O cable assemblies.[3]
Status—obsolete[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]web.archive.orgweb.archive.org
  4. [4]waferpedia.comwaferpedia.com