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0010-13627 High Efficiency RF MatchversusSM 32 C

Applied Materials 0010-13627 High Efficiency RF Match, Thermotron SM 32 C, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
SM 32 CThermotron
OEMApplied MaterialsThermotron
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13627 High Efficiency RF MatchThermotron SM 32 C
Specifications
ConfigurationHE, BIAS[1]—
Asset Number70430[2]—
TypeHigh Efficiency RF Match - HE, BIAS[2]—
OEMApplied Materials[2]—
Model0010-13627[2]—
Volume—32 Cubic Feet[3]
Interior Dimensions—37"W x 37"D x 37"H[3]
Temperature Range—-40C to 180C (-40F to 356F)[3]
Temperature Control Tolerance—+/- 0.3C[3]
Humidity Range—20% to 95%[3]
Compressor—2 HP[3]
Electrical Requirements—460V/60Hz/3Ph/18.5A[3]
Machine Dimensions (approximate)—63"W x 63"D x 98"H[3]
Weight (approximate)—2,200 lbs[3]
Controller—Thermotron 8200 (door mounted)[3]
Serial Number—22593-S[3]
Year of Manufacture—1993[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]libertymachinery.comlibertymachinery.com