Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Lam Research TCP 9400 DFM Poly, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | TCP 9400 DFM PolyLam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Lam Research TCP 9400 DFM Poly |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | — |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Phase | — | 50/60 Hz, 3 Phase, 4 Wire[3] |
| Software | — | A4.0-37VM[3] |
| PM2 Gas box | — | (10) Brooks GF125[3] |
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