Waferpedia

Comparison ledger

0010-18024 Pyrometer AssemblyversusSurfscan SP 3 Particle Defect

Applied Materials 0010-18024 Pyrometer Assembly, KLA Surfscan SP 3 Particle Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—Bare wafer inspection station
Process node——
Introduced——
Production run—2011–
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyKLA Surfscan
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]HDD not included[2]
Wafer size—Bare wafer inspection station[2]
Illumination—Deep-ultraviolet (DUV)[2]
Wafer loading unit ports—3[2]
Haze maps—Full-wafer high-resolution[2]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing