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0010-18024 Pyrometer AssemblyversusLeo 1530 FE-SEM

Applied Materials 0010-18024 Pyrometer Assembly, Zeiss Leo 1530 FE-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsZeiss
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyZeiss LEO
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]Four-Quadrant Backscattered Electron Detector (4QBSD)[2]
OXFORD 6901 EDX Detector with resolution—133 eV at 5.9 KeV[2]
Determination area—10 mm²[2]
Detectors—Four-Quadrant Backscattered Electron Detector (4QBSD), E-T Detector, In-lens detector[2]
EDX Detector—OXFORD 6901 EDX Detector with resolution 133 eV at 5.9 KeV, determination area 10 mm²[2]
Resolution—Sub-nanometer[3]
Voltage Range—0.2-30 kV[3]
Maximum Substrate Size—6 inch[3]
Stage—Motorized x/y/z axes[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]nnci.netnnci.net