Comparison ledger
Applied Materials 0010-21246 Part, KLA 6220, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-21246 PartApplied Materials | 6220KLA |
|---|---|---|
| OEM | Applied Materials | KLA |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | KLA 6220 |
| Specifications | ||
| Model | — | 6220[1] |
| Inspection type | — | Particle inspection system[2] |
| Wafer sizes | — | 2", 3", 4", 6", and 8" wafers capable[2] |
| Illumination source | — | 30 mW argon-ion laser, 488 nm wavelength[2] |
| Throughput | — | 100 wph (200 mm) at 0.12 mm[2] |
| Sensitivity | — | 90 nm sensitivity, >80% capture rate[3] |