Waferpedia

Comparison ledger

0010-22161 High EFF RF MatchversusTurbovac 150 Vacuum

Applied Materials 0010-22161 High EFF RF Match, Leybold Turbovac 150 Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsLeybold
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchLeybold Turbovac 150
Specifications
MakeApplied Materials[1]Leybold[4]
Model0010-22161[1]Turbovac 150[4]
DescriptionHTESC PH 1 REV A[2]Turbomolecular Vacuum Pump[5]
ConditionUsed[2]—
Stock NumberBM6628[2]—
Voltage—115V[3]
Pumping Speed—150 l/s[5]
Ultimate Pressure—-8 mbar[5]
Weight—20.00 lbs[5]
Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]Equipment inventory listing
  5. [5]ptbsales.comptbsales.com