Waferpedia

Comparison ledger

0015 20064 PartversusPfeiffer TPU 060 Turbomolecular

Applied Materials 0015 20064 Part, Balzers Pfeiffer TPU 060 Turbomolecular, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0015 20064 PartApplied Materials
OEMApplied MaterialsBalzers
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0015 20064 PartBalzers Pfeiffer TPU
Specifications
ConfigurationMod.. Rose Enclosures 33121206 Water Lea[1]—
ManufacturerApplied Materials[2]—
Part Number0015-20064[2]—
DescriptionMOD.. ROSE ENCLOSURES 33121206 WATER LEA[2]—
OEMApplied Materials[1]—
Model0015 20064[1]—
Flange Type—DN 63 CF[3]
Operating Agent—TL 011[3]
Volume Flow Rate—56 l/s[3]
Type—Turbomolecular pump[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]asseta.comasseta.com
  3. [3]inventory listing