Waferpedia

Comparison ledger

0015 20064 PartversusEPX 500 NE Dry

Applied Materials 0015 20064 Part, Edwards EPX 500 NE Dry, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0015 20064 PartApplied Materials
OEMApplied MaterialsEdwards
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0015 20064 PartEdwards EPX
Specifications
ConfigurationMod.. Rose Enclosures 33121206 Water Lea[1]200/208 Volts[3]
ManufacturerApplied Materials[2]—
Part Number0015-20064[2]—
DescriptionMOD.. ROSE ENCLOSURES 33121206 WATER LEA[2]—
OEMApplied Materials[1]Edwards[4]
Model0015 20064[1]EPX 500 NE[4]
Equipment type—Dry pump[4]
Electrical—200/208 volts[3]
Frequency—50/60 Hz[4]
Current—16 amps[4]
Power—200/208 Volts[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]asseta.comasseta.com
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com