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0015 20064 PartversusAlcatel 2033 Rotary Vane

Applied Materials 0015 20064 Part, Pfeiffer Alcatel 2033 Rotary Vane, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0015 20064 PartApplied Materials
OEMApplied MaterialsPfeiffer
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0015 20064 PartPfeiffer Alcatel
Cited variants—
Specifications
ConfigurationMod.. Rose Enclosures 33121206 Water Lea[2]Serviced with Alcatel TA101 Thermocouple[4]
ManufacturerApplied Materials[3]—
Part Number0015-20064[3]—
DescriptionMOD.. ROSE ENCLOSURES 33121206 WATER LEA[3]Rotary vane pump[4]
OEMApplied Materials[2]Pfeiffer / Alcatel[4]
Model0015 20064[2]2033[4]
Make—Pfeiffer / Alcatel[4]
Type—Mechanical forepumps[1]
Number of stages—2[5]
Nominal rotational speed—1,500 rpm[5]
Nominal pumping speed—30 m3/h (23.3 cfm) at 50Hz[5]
Pneurop pumping speed—27 m3/h (18.8 cfm) at 50Hz[5]
Ultimate partial pressure—2 x 10^-4 mbar[5]
Ultimate total pressure open gas ballast—2 x 10^-2 mbar[5]
Oil capacity—3.6 liters[5]
Weight—61 kg (134 lbs)[5]
Inlet and outlet flanges—ISO-KF DN 40[5]
Serviced with—Alcatel TA101 Thermocouple[4]
Gas ballast—Manual gas ballast[5]
Category—Vacuum pump / vacuum forepump[1]
Stages—2[1]
Free air displacement—35 m3/h at 50 Hz; 65 m3/h at 60 Hz[1]
Air displacement (Pneurop method)—30 m3/h at 50 Hz; 60 m3/h at 60 Hz[1]
Base pressure without gas ballast—< 1.10-4 mbar at 50 Hz; < 2.10-4 mbar at 60 Hz[1]
Base pressure with gas ballast—< 5.10-3 mbar[1]
Maximum permissible water vapor pressure—30 mbar at 50 Hz; 25 mbar at 60 Hz[1]
Inlet and outlet—NW 40 Pneurop nipples[1]
Manual gas ballast accessory part number—068391[1]
Oil mist eliminator accessory part number—068442[1]
Dust filter accessory part number—068480[1]
Liquid nitrogen trap accessory part number—786537[1]
Pump type—Mechanical forepump[1]
Frequency—50 Hz / 60 Hz[1]
Application—Neutral or normal atmosphere gases[1]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]idealvac.comidealvac.com
  2. [2]inventory listing
  3. [3]asseta.comasseta.com
  4. [4]inventory listing
  5. [5]ptbsales.comptbsales.com