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0015 20064 PartversusTPU 060 Turbomolecular Vacuum

Applied Materials 0015 20064 Part, Pfeiffer TPU 060 Turbomolecular Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0015 20064 PartApplied Materials
OEMApplied MaterialsPfeiffer
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
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FamilyApplied Materials 0015 20064 PartPfeiffer TPU
Cited variants—
  • TPU 060 Mod PM P 01 401[1]
Specifications
ConfigurationMod.. Rose Enclosures 33121206 Water Lea[2]—
ManufacturerApplied Materials[3]Pfeiffer[1]
Part Number0015-20064[3]—
DescriptionMOD.. ROSE ENCLOSURES 33121206 WATER LEA[3]Turbomolecular vacuum pump[4]
OEMApplied Materials[2]—
Model0015 20064[2]TPU 060[1]
Mod—PM P 01 401[4]
Type—Turbomolecular high vacuum system[5]
Make—Pfeiffer[1]
Modification Code—PM P 01 401[1]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]asseta.comasseta.com
  4. [4]waferpedia.comwaferpedia.com
  5. [5]reticulum.onlinereticulum.online