Waferpedia

Comparison ledger

0015 20064 PartversusR 301

Applied Materials 0015 20064 Part, Seren R 301, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0015 20064 PartApplied Materials
R 301Seren
OEMApplied MaterialsSeren
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0015 20064 PartSeren R 301
Specifications
ConfigurationMod.. Rose Enclosures 33121206 Water Lea[1]Input Power:[3]
ManufacturerApplied Materials[2]—
Part Number0015-20064[2]—
DescriptionMOD.. ROSE ENCLOSURES 33121206 WATER LEA[2]—
OEMApplied Materials[1]—
Model0015 20064[1]—
Output Power—300 Watts, 13.56 MHz[3]
Equipment type—RF generator[3]
Category—Lab & Support Equipment[4]
Maximum output power—300 Watts, 13.56 MHz[3]
Input power—90-140 OR 190-264 VAC[3]
Input frequency—47 - 63 Hz[3]
Maximum apparent power—750 VA Max[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]asseta.comasseta.com
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com