Waferpedia

Comparison ledger

0020 17484 PartversusEagle XP 8

Applied Materials 0020 17484 Part, ASM Eagle XP 8, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
0020 17484 PartApplied Materials
OEMApplied MaterialsASM
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 17484 PartASM Eagle XP 8
Specifications
ConfigurationBar, Cap Bank, Hdpcvd 300mm Ultima X[1]—
Wafer Size—300 mm (12 inch)[2]
Process Type—Plasma-Enhanced ALD (PEALD)[2]
Maximum Chambers—8 (via up to 4 Dual Chamber Modules)[2]
Chamber Configuration—Up to 4 Dual Chamber Modules (DCM)[2]

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]asm.comasm.com