Waferpedia

Comparison ledger

0020 17484 PartversusIntegra RS

Applied Materials 0020 17484 Part, Axcelis Integra RS, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
0020 17484 PartApplied Materials
Integra RSAxcelis
OEMApplied MaterialsAxcelis
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 17484 PartAxcelis Integra RS
Specifications
ConfigurationBar, Cap Bank, Hdpcvd 300mm Ultima X[1]—
Manufacturer—Axcelis[2]
Model—Integra RS[2]
Process type—CVD (Chemical Vapor Deposition)[2]
Vintage—2012[2]
Application—Production of 3x nm and below NAND Flash devices[3]
Platform—single, modular wafer handling platform[3]

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]prnewswire.comprnewswire.com