Waferpedia

Comparison ledger

0020 17484 PartversusTrias Metal

Applied Materials 0020 17484 Part, Tokyo Electron Trias Metal, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0020 17484 PartApplied Materials
Trias MetalTokyo Electron
OEMApplied MaterialsTokyo Electron
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 17484 PartTokyo Electron Trias
Specifications
ConfigurationBar, Cap Bank, Hdpcvd 300mm Ultima X[1]Ti/TiN[2]
Process type—Metal Chemical Vapor Deposition (CVD)[2]
Wafer size—12 inch[2]
Deposited material—Ti/TiN[2]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]fabsurplus.comfabsurplus.com
  4. [4]fabsurplus.comfabsurplus.com