Waferpedia

Comparison ledger

0020 17484 PartversusK 465 i GaN MOCVD

Applied Materials 0020 17484 Part, Veeco K 465 i GaN MOCVD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
0020 17484 PartApplied Materials
OEMApplied MaterialsVeeco
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 17484 PartVeeco K 465 i GaN MOCVD
Specifications
ConfigurationBar, Cap Bank, Hdpcvd 300mm Ultima X[1]50/60 Hz[2]
Filter—CT 500[2]
Phase—3 Phase[2]
Current—200 A[2]
SCCR—10 kA[2]
Voltage—380 VAC[2]
Tool type—metal organic chemical vapor deposition system[4]
Process designation—GaN MOCVD[2]
Frequency—50/60 Hz[2]

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com