Waferpedia

Comparison ledger

0020 19652 PartversusEPX 500 NE Dry

Applied Materials 0020 19652 Part, Edwards EPX 500 NE Dry, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0020 19652 PartApplied Materials
OEMApplied MaterialsEdwards
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 19652 PartEdwards EPX
Specifications
ConfigurationRetainer Bracket, Top Match, 200mm Ultim[1]200/208 Volts[2]
OEM—Edwards[3]
Model—EPX 500 NE[3]
Equipment type—Dry pump[3]
Electrical—200/208 volts[2]
Frequency—50/60 Hz[3]
Current—16 amps[3]
Power—200/208 Volts[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com