Waferpedia

Comparison ledger

0020 19652 PartversusR 3001

Applied Materials 0020 19652 Part, Seren R 3001, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
0020 19652 PartApplied Materials
R 3001Seren
OEMApplied MaterialsSeren
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 19652 PartSeren R 3001
Specifications
ConfigurationRetainer Bracket, Top Match, 200mm Ultim[1]27.12 Mhz 3 Kw[2]
Equipment type—RF generator[3]
Frequency—27.12 MHz[2]
Power—3 kW[2]
Make—Seren[2]
Model—R 3001[2]

Plan your fab

Building a Lab & Support Equipment process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com